Field-Emission
Environmental Scanning Electron Microscope
FEI/Phillps XL30 ESEM-FEG

Images

The Field-Emission Environmental SEM Philips XL30 is a unique instrument in which specimens can be examined with a field-emission source electron beam in an exceptionally high chamber pressure environment.  It combines two main advantages: 
  • Very high resolution/magnification and excellent signal to noise ratio in both regular high vacuum and environmental (Wet) mode due to field-emission electron source.
  • Real “Wet” mode (100% humidity in the specimen chamber) and the possibility to examine specimens with pressure in the chamber up to 10 Torr due to a patented gaseous secondary electron detector.
Almost any specimen of suitable size can be examined in this microscope without destruction and additional specimen preparation procedures, which usually lead to various artifacts.

 
Wet Mode

By utilizing cooling Peltier stage and high water vapor pressure in the specimen chamber it is possible to achieve high levels of humidity (up to 100%). In these conditions wet or hydrated specimens (cells, plant samples, tissue, etc.) will not dry and introduce any artifacts. Dynamic experiments are also possible; for example, drying or crystallization processes can be examined. 

Wet mode is very useful not only for observing hydrated specimens, but for observing non-conductive specimens as well. Paper, plastics, ceramics, fibers, fabrics, outgassing materials – everything goes! And  resolution in wet mode is as high as in high vacuum mode. 

Water sensitive non-conductive samples can be examined in atmosphere of nitrogen or other gases . 

Unlike instruments from other manufacturers, Philips environmental microscopes provide true secondary electron imaging, and so achieve very high resolution and can use low beam intensity. This is very important for beam-sensitive specimens such as biological samples, plastics, textile fibers.

High Vacuum Mode

The main advantage of the XL30 in high vacuum mode is its field-emission electron gun and advanced electron optics. So, a very high resolution/magnification is obtainable at any high voltage setting. 
High vacuum mode can be divided in two sub modes: 

  • Low voltage mode – for observing non coated samples. Very low voltage (0.2-1.0 kV) can be used for observation of beam sensitive samples.
  • Regular mode – for observing conductive and coated samples. Since useful resolution is very specimen dependable, this mode usually yields best results at highest magnifications.

 
The XL30 is a fully computerized microscope and offers a wide range of image acquisition, analysis and storage possibilities.

 
XL30 ESEM-FEG specifications
Resolution 
Accelerating voltage 
Electron gun 
Magnification 
Stage movements 
   (4 axis motorized stage) 
 

Image media: 

Detectors: 
   Wet Mode: 
 

   High Vacuum Mode: 
 

2 nm 
0.2 to 30 kV 
Field-Emission 
15 to 500,000 
Tilt                  -15° to +75° 
Z                      50 mm 
X                      50 mm 
Y                      50 mm 
Digital storage 
Polaroid film 

Gaseous secondary electron detector 
Set of environmental secondary detectors 
Solid state backscattered electron detector 
Everhart-Thornley secondary electron detector 
Solid state backscattered electron detector

Digital EDS Prism X-ray detector with IMIX-PC system.
Peltier cooling stage 
Specimen chamber CCD camera

 
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